James W. Bayne Professor of Mechanical Engineering
University of Illinois at Urbana-Champaign
Department of Mechanical Science and Engineering
1206 W. Green St.
Urbana, IL 61801
|University of California at Berkeley||Mechanical Engineering||B.S.||1989|
|University of California at Berkeley||Applied Mechanics and Mechanical Design||M.S.||1991|
|University of California at Berkeley||Applied Mechanics and Mechanical Design||Ph.D.||1993|
|2006-present||James W. Bayne Professor of Mechanical Engineering|
|2000-2006||Associate Professor, Dept. of Mechanical & Industrial Engineering, UIUC|
|2000-present||Affiliate, Dept of Bioengineering, UIUC|
|1997-present||Affiliate, Beckman Institute of Advanced Science and Engineering, UIUC|
|1996-present||Affiliate, Dept of Electrical and Computer Engineering, UIUC|
|1994-2000||Assistant Professor, Dept. of Mechanical & Industrial Engineering, UIUC|
|1993-1994||Post-Doctoral Fellow, Lawrence Berkeley National Laboratory|
Awards and Distinctions
- Xerox Award for Faculty Research, Xerox/College of Engineering, UIUC, 2004
- Willett Faculty Scholar, College of Engineering, UIUC, 2004
- BP Award for Innovation in Undergraduate Instruction, BP Foundation, 2006
Chandrasekharan, Ramesh, Richard I. Masel, and Mark A. Shannon, "Experimental Technique Using FTIR to Estimate IR Optical Properties at Variable Temperatures: Application to PMDA-ODA Polyimide Thin Films from 100 to 380oC." Review of Scientific Instruments 78 p. 53105 2007.
Chandrasekharan, Ramesh, Shaurya Prakash, and Mark A. Shannon, "Change in Radiative Optical Properties of Ta2O5 Thin Films due to High Temperature Heat Treatment." Journal of Heat Transfer 129 pp. 27-36 2007.
Prakash, Shaurya, Junghoon Yeom, Niu Jin, I. Adesida, and Mark A. Shannon, "Characterization of Ionic Transport at the Nanoscale." Journal of Nanoengineering and Nanosystems 220 pp. 45-52 2007.
Prakash, Shaurya, Timothy M. Long, John C. Selby, Jeffrey S. Moore, and Mark A. Shannon, "Click Modification of Silica Surfaces and Glass Microfluidic Channels." Analytical Chemistry 79 pp. 1661-1667 2007.
Flachsbart, Bruce R., K. Wong, J.M. Iannacone, E.N. Abante, R.L. Vlach, P.A. Rauchfuss, T.W. Yasunaga, Paul W. Bohn, Jonathon V. Sweedler, and Mark A. Shannon, "Design and Fabrication of a Multilayered Polymer Microfluidic Chip with Nanofluidic Interconnects via Adhesive Contact Printing." Lab on a Chip 6 pp. 667-674 2006.
Flachsbart, Bruce R., Kachuen Wong, Jamie M. Iannacone, Edward N. Abante, Robert L. Vlach, Peter A. Rauchfuss, Paul W. Bohn, Jonathon V. Sweedler, and Mark A. Shannon, "Design and Fabrication of a Multilayered Polymer Microfluidic Chip with Nanofluidic Interconnects via Adhesive Contact Printing." Lab on a Chip 6 pp. 667-674 2006.
Long, Timothy M., Shaurya Prakash, Mark A. Shannon, and Jeffrey S. Moore, "Water-Vapor Plasma-Based Surface Activation for Trichlorosilane Modification of PMMA." Langmuir 22 pp. 4104-4109 2006.
Wu, Yan, and Mark A. Shannon, "An AC Driving Amplitude Dependent Systematic Error in Scanning Kelvin Probe Microscope Measurements: Detection and Correction." Review of Scientific Instruments 77 p. 43711 2006.
Chandrasekharan, Ramesh, Inkyu Park, R.I. Masel, and Mark A. Shannon, "Thermal Oxidation of Tantalum Films at Various Oxidation States from 300 - 700oC." Journal of Applied Physics 98 p. 114908 2005.
He, D., Mark A. Shannon, and N.R. Miller, "Micromachined Silicon Electrolytic Conductivity Probes with Integrated Temperature Sensor." IEEE Sensors Journal 5 pp. 1185-1196 2005.
Yeom, Junghoon, Yan Wu, John C. Selby, and Mark A. Shannon, "Maximum Achievable Aspect Ratio in Deep Reactive Ion Etching of Silicon due to Aspect Ratio Dependent Transport and the Microloading Effect." The Journal of Vacuum Science and Technology B 23 pp. 2319-2329 2005.
Cannon, Jr., Donald M., Bruce R. Flachsbart, Mark A. Shannon, Jonathan V. Sweedler, and Paul W. Bohn, "Fabrication of Single Nanofluidic Channels in Poly(methylmethacrylate) Films via Focused-Ion Beam Milling for Use as Molecular Gates." Applied Physics Lettters 85 pp. 1241-1243 2004.
Wu, Yan, and Mark A. Shannon, "Theoretical Analysis of the Effect of Static Charges in Silicon-Based Dielectric Thin Films on Micro- to Nanoscale Electrostatic Actuation." Journal of Micromechanics and Microengineering 14 pp. 989-998 2004.