Mark Shannon

James W. Bayne Professor of Mechanical Engineering
University of Illinois at Urbana-Champaign
Department of Mechanical Science and Engineering
1206 W. Green St.
Urbana, IL 61801

Phone:217-244-1545
Fax:217-244-6534
Email:
Web Site: http://www.mechse.uiuc.edu/research/shannon/

Professional Preparations

University of California at Berkeley Mechanical Engineering B.S. 1989
University of California at Berkeley Applied Mechanics and Mechanical Design M.S. 1991
University of California at Berkeley Applied Mechanics and Mechanical Design Ph.D. 1993

Appointments

2006-present James W. Bayne Professor of Mechanical Engineering
2000-2006 Associate Professor, Dept. of Mechanical & Industrial Engineering, UIUC
2000-present Affiliate, Dept of Bioengineering, UIUC
1997-present Affiliate, Beckman Institute of Advanced Science and Engineering, UIUC
1996-present Affiliate, Dept of Electrical and Computer Engineering, UIUC
1994-2000 Assistant Professor, Dept. of Mechanical & Industrial Engineering, UIUC
1993-1994 Post-Doctoral Fellow, Lawrence Berkeley National Laboratory

Awards and Distinctions

Publications

Chandrasekharan, Ramesh, Richard I. Masel, and Mark A. Shannon, "Experimental Technique Using FTIR to Estimate IR Optical Properties at Variable Temperatures: Application to PMDA-ODA Polyimide Thin Films from 100 to 380oC." Review of Scientific Instruments 78 p. 53105 2007.

Chandrasekharan, Ramesh, Shaurya Prakash, and Mark A. Shannon, "Change in Radiative Optical Properties of Ta2O5 Thin Films due to High Temperature Heat Treatment." Journal of Heat Transfer 129 pp. 27-36 2007.

Prakash, Shaurya, Junghoon Yeom, Niu Jin, I. Adesida, and Mark A. Shannon, "Characterization of Ionic Transport at the Nanoscale." Journal of Nanoengineering and Nanosystems 220 pp. 45-52 2007.

Prakash, Shaurya, Timothy M. Long, John C. Selby, Jeffrey S. Moore, and Mark A. Shannon, "Click Modification of Silica Surfaces and Glass Microfluidic Channels." Analytical Chemistry 79 pp. 1661-1667 2007.

Flachsbart, Bruce R., K. Wong, J.M. Iannacone, E.N. Abante, R.L. Vlach, P.A. Rauchfuss, T.W. Yasunaga, Paul W. Bohn, Jonathon V. Sweedler, and Mark A. Shannon, "Design and Fabrication of a Multilayered Polymer Microfluidic Chip with Nanofluidic Interconnects via Adhesive Contact Printing." Lab on a Chip 6 pp. 667-674 2006.

Flachsbart, Bruce R., Kachuen Wong, Jamie M. Iannacone, Edward N. Abante, Robert L. Vlach, Peter A. Rauchfuss, Paul W. Bohn, Jonathon V. Sweedler, and Mark A. Shannon, "Design and Fabrication of a Multilayered Polymer Microfluidic Chip with Nanofluidic Interconnects via Adhesive Contact Printing." Lab on a Chip 6 pp. 667-674 2006.

Long, Timothy M., Shaurya Prakash, Mark A. Shannon, and Jeffrey S. Moore, "Water-Vapor Plasma-Based Surface Activation for Trichlorosilane Modification of PMMA." Langmuir 22 pp. 4104-4109 2006.

Wu, Yan, and Mark A. Shannon, "An AC Driving Amplitude Dependent Systematic Error in Scanning Kelvin Probe Microscope Measurements: Detection and Correction." Review of Scientific Instruments 77 p. 43711 2006.

Chandrasekharan, Ramesh, Inkyu Park, R.I. Masel, and Mark A. Shannon, "Thermal Oxidation of Tantalum Films at Various Oxidation States from 300 - 700oC." Journal of Applied Physics 98 p. 114908 2005.

He, D., Mark A. Shannon, and N.R. Miller, "Micromachined Silicon Electrolytic Conductivity Probes with Integrated Temperature Sensor." IEEE Sensors Journal 5 pp. 1185-1196 2005.

Yeom, Junghoon, Yan Wu, John C. Selby, and Mark A. Shannon, "Maximum Achievable Aspect Ratio in Deep Reactive Ion Etching of Silicon due to Aspect Ratio Dependent Transport and the Microloading Effect." The Journal of Vacuum Science and Technology B 23 pp. 2319-2329 2005.

Cannon, Jr., Donald M., Bruce R. Flachsbart, Mark A. Shannon, Jonathan V. Sweedler, and Paul W. Bohn, "Fabrication of Single Nanofluidic Channels in Poly(methylmethacrylate) Films via Focused-Ion Beam Milling for Use as Molecular Gates." Applied Physics Lettters 85 pp. 1241-1243 2004.

Wu, Yan, and Mark A. Shannon, "Theoretical Analysis of the Effect of Static Charges in Silicon-Based Dielectric Thin Films on Micro- to Nanoscale Electrostatic Actuation." Journal of Micromechanics and Microengineering 14 pp. 989-998 2004.